Patent Assignment
Reel/Frame 019569/0694
Assignment of Assignor's Interest
Recorded: 2007-07-18
Pages: 5
Assignors
RUZIC, DAVID
Executed: 2003-09-11
BRISTOL, ROBERT
Executed: 2003-09-12
RICE, BRYAN J.
Executed: 2003-09-12
Assignee
INTEL CORPORATION
2200 MISSION COLLEGE BLVD., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Plasma-Based Debris Mitigation for Extreme Ultraviolet (Euv) Light Source