Patent Assignment
Reel/Frame 019653/0312
Assignment of Assignor's Interest
Recorded: 2007-08-06
Pages: 4
Assignors
KANDEL, DANIEL
Executed: 2007-07-25
LEVINSKI, VLADIMIR
Executed: 2007-07-15
ADEL, MICHAEL E.
Executed: 2007-07-15
SELIGSON, JOEL L.
Executed: 2007-07-15
Assignee
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(3)
Order Selected Overlay Metrology
Order selected overlay metrology
Application:
60/810,560 →
Systems and techniques for semiconductor metrology inspection
Application:
60/897,637 →