IP Library › Patent Application 60897637
Patent Application Provisional
App. No. 60/897,637 · Confirmation No. 1544

Systems and techniques for semiconductor metrology inspection

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2007-04-26 APP.FILE.REC Filing Receipt 3 View
2007-04-23 PEFR Applicant Response to Pre-Exam Formalities Notice 3 View
2007-04-23 ADS Application Data Sheet 3 View
2007-04-23 WFEE Fee Worksheet (SB06) 2 View
2007-04-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-04-23 WFEE Fee Worksheet (SB06) 2 View
2007-02-26 APP.FILE.REC Filing Receipt 3 View
2007-02-26 PEFN Pre-Exam Formalities Notice 2 View
2007-01-26 TRNA Transmittal of New Application 2 View
2007-01-26 SPEC Specification 14 View
2007-01-26 DRW Drawings-only black and white line drawings 30 View
2007-01-26 WFEE Fee Worksheet (SB06) 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
60/897,637
Filed
2007-01-26