Patent Assignment
Reel/Frame 019865/0234
Assignment of Assignor's Interest
Recorded: 2007-09-24
Pages: 8
Assignors
WAGNER, CHRISTIAN
Executed: 2007-04-30
TRUNZ, MICHAEL
Executed: 2007-09-23
HILGERS, RALF
Executed: 2007-04-25
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Arrangement and Projection Exposure System for Microlithography with Passive Thermal Compensation
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.