Assignment of Assignor's Interest

Recorded: 2007-09-24 Pages: 2

Assignor

FIOLKA, DAMIAN

Executed: 2007-09-11

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Illumination System for a Microlithographic Projection Exposure Apparatus

Application: 11/814,929 →

Publication: US 2009/0009744

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.