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Patent Application Utility PCT National Stage
App. No. 11/814,929 · Confirmation No. 1748

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Inventor: Damian Fiolka
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2012-04-05 ABN Abandonment 2 View
2011-12-01 CTAV Advisory Action (PTOL-303) 3 View
2011-12-01 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2011-11-08 A.NE Response After Final Action 1 View
2011-11-08 CLM Claims 5 View
2011-11-08 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2011-11-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-11-08 WFEE Fee Worksheet (SB06) 1 View
2011-09-26 CTFR Final Rejection 8 View
2011-09-26 FWCLM Index of Claims 1 View
2011-09-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2011-09-01 CLM Claims 5 View
2011-09-01 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2011-09-01 XT/ Extension of Time 1 View
2011-09-01 WFEE Fee Worksheet (SB06) 2 View
2011-09-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-09-01 WFEE Fee Worksheet (SB06) 1 View
2011-05-02 CTNF Non-Final Rejection 7 View
2011-05-02 892 List of references cited by examiner 1 View
2011-05-02 SRNT Examiner's search strategy and results 6 View
2011-05-02 1449 List of References cited by applicant and considered by examiner 2 View
2011-05-02 FWCLM Index of Claims 1 View
2011-05-02 1449 List of References cited by applicant and considered by examiner 2 View
2011-05-02 SRFW Search information including classification, databases and other search related notes 1 View
2011-05-02 BIB Bibliographic Data Sheet 1 View
2009-01-08 NTC.PUB Notice of Publication 1 View
2008-10-02 M903 Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed 2 View
2008-10-02 APP.FILE.REC Filing Receipt 3 View
2008-09-17 M905 Notice of DO/EO Missing Requirements Mailed 2 View
2008-09-17 PEFR Applicant Response to Pre-Exam Formalities Notice 1 View
2008-09-17 OATH Oath or Declaration filed 3 View
2008-09-17 WFEE Fee Worksheet (SB06) 2 View
2008-09-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-09-17 IMIS Miscellaneous Internal Document 1 View
2008-09-17 N417 Electronic Filing System Acknowledgment Receipt 1 View
2008-09-15 371P Documents submitted with 371 (National Stage) Applications 7 View
2008-09-15 IMIS Miscellaneous Internal Document 1 View
2008-09-15 WFEE Fee Worksheet (SB06) 1 View
2008-09-15 WCLM Claims Worksheet (PTO-2022) 1 View
2007-09-04 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2007-09-04 P.210.IN Incoming ISR, 237 and References from IB 3 View
2007-09-04 FOR Foreign Reference 63 View
2007-09-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-07-27 A.PE Preliminary Amendment 1 View
2007-07-27 SPEC Specification 1 View
2007-07-27 CLM Claims 5 View
2007-07-27 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2007-07-27 ABST Abstract 1 View
2007-07-27 SPEC Specification 17 View
2007-07-27 CLM Claims 5 View
2007-07-27 DRW Drawings-only black and white line drawings 6 View
2007-07-27 P.210.IN Incoming ISR, 237 and References from IB 2 View
2007-07-27 TRNA Transmittal of New Application 2 View
2007-07-27 WFEE Fee Worksheet (SB06) 2 View
2007-07-27 N417 Electronic Filing System Acknowledgment Receipt 3 View
2007-07-27 ADS Application Data Sheet 4 View
2007-07-27 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2007-07-27 ABST Abstract 1 View
2007-07-27 SPEC Specification 17 View
2007-07-27 CLM Claims 5 View
2007-07-27 DRW Drawings-only black and white line drawings 6 View
2007-07-27 OATH Oath or Declaration filed 1 View
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Quick Facts
App. No.
11/814,929
Filed
2008-09-17
Effective Filing
2007-07-27
Pub. No.
US20090009744A1
Art Unit
2882