Patent Assignment
Reel/Frame 019888/0862
Assignment of Assignor's Interest
Recorded: 2007-09-27
Pages: 4
Assignors
TOTZECK, MICHAEL
Executed: 2007-09-10
KRAEHMER, DANIEL
Executed: 2007-09-03
GRUNER, TORALF
Executed: 2007-08-27
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical System, in Particular Objective or Illumination System for a Microlithographic Projection Exposure Apparatus
Application:
11/813,902 →
Publication:
US 2008/0198455
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.