Patent Assignment
Reel/Frame 020273/0395
Confirmatory License
Recorded: 2007-12-17
Pages: 2
Assignor
NORTHWESTERN UNIVERSITY
Executed: 2007-08-17
Assignee
NAVY, SECRETARY OF THE, UNITED STATES OF AMERICA
875 NORTH RANDOLPH STREET, OFFICE OF NAVAL RESEARCH, ARLINGTON, VIRGINIA, 22203-1995
Covered Property
(1)
Optical System, in Particular Objective or Illumination System for a Microlithographic Projection Exposure Apparatus
Application:
11/813,902 →
Publication:
US 2008/0198455
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.