Patent Assignment
Reel/Frame 019903/0942
Assignment of Assignor's Interest
Recorded: 2007-10-01
Pages: 3
Assignors
BYKANOV, ALEXANDER N.
Executed: 2007-09-24
ERSHOV, ALEXANDER I.
Executed: 2007-10-01
FOMENKOV, IGOR V.
Executed: 2007-09-25
BRANDT, DAVID C.
Executed: 2007-09-25
Assignee
CYMER, INC.
17075 THORNMINT COURT, LEGAL DEPT. MS/4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
Gas Management System for a Laser-Produced-Plasma Euv Light Source
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.