Assignment of Assignor's Interest

Recorded: 2007-10-09 Pages: 2

Assignor

BROTSACK, MARKUS

Executed: 2007-10-01

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STR. 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Illumination System, In Particular For A Projection Exposure Machine In Semiconductor Lithography

Application: 11/814,685 →

Publication: US 2008/0273186

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.