Patent Assignment
Reel/Frame 019961/0389
Assignment of Assignor's Interest
Recorded: 2007-10-09
Pages: 3
Assignors
COSKUN, TAMER
Executed: 2006-09-19
PARK, SANGBONG
Executed: 2006-09-19
CHEN, JANG FUNG
Executed: 2006-09-20
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, 5500 AH VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method, Program Product and Apparatus for Obtaining Short-Range Flare Model Parameters for Lithography Simulation Tool
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.