Patent Assignment
Reel/Frame 019967/0433
Assignment of Assignor's Interest
Recorded: 2007-10-16
Pages: 2
Assignor
MANN, HANS-JUERGEN
Executed: 2007-10-02
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Microlithography Projection System with an Accessible Diaphragm or Aperture Stop
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.