Patent Assignment
Reel/Frame 020038/0544
Assignment of Assignor's Interest
Recorded: 2007-10-29
Pages: 2
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Manufacturing Method of a Semiconductor Device, and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.