Patent Assignment
Reel/Frame 020076/0179
Assignment of Assignor's Interest
Recorded: 2007-11-06
Pages: 3
Assignor
BEVIS, CHRISTOPHER F.
Executed: 2007-09-11
Assignee
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(2)
Scatterometry Target Employing Non-Periodic Defect Features to Enhance or Optimize Target Sensitivity to a Parameter of Interest
Patent:
7,940,386 →
Application:
11/848,158 →
Scatterometry Target Employing Non-Periodic Defect Features to Enhance or Optimize Target Sensitivity to a Parameter of Interest
Application:
60/949,801 →
Related Assignments
(1)
Other recorded transfers of the patents in this record — the chain of ownership.