Merger

Recorded: 2011-03-31 Pages: 5

Assignor

Executed: 2009-06-30

Assignee

KLA-TENCOR CORPORATION

ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035

Covered Property (1)

Scatterometry Target Employing Non-Periodic Defect Features to Enhance or Optimize Target Sensitivity to a Parameter of Interest

Patent: 7,940,386 →

Application: 11/848,158 →

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.