Patent Assignment
Reel/Frame 020131/0739
Assignment of Assignor's Interest
Recorded: 2007-11-19
Pages: 2
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398 HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Substrate with Marker, Manufacturing Method Thereof, Laser Irradiation Apparatus, Laser Irradiation Method, Light Exposure Apparatus, and Manufacturing Method of Semiconductor Device