Patent Assignment
Reel/Frame 020138/0678
Assignment of Assignor's Interest
Recorded: 2007-11-14
Pages: 3
Assignor
TEJNIL, EDITA
Executed: 2007-10-23
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, 5500 AH VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method, program product and apparatus for modeling resist development of a lithography process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.