Patent Assignment
Reel/Frame 020165/0700
Assignment of Assignor's Interest
Recorded: 2007-11-27
Pages: 4
Assignors
SHAH, KAVITA
Executed: 2007-11-01
YANG, HAICHUN
Executed: 2007-11-08
CHU, SCHUBERT S.
Executed: 2007-11-01
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, LEGAL AFFAIRS DEPARTMENT, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Vapor Deposition Processes for Tantalum Carbide Nitride Materials