Patent Assignment
Reel/Frame 020168/0575
Assignment of Assignor's Interest
Recorded: 2007-11-28
Pages: 5
Assignors
MANN, HANS-JUERGEN
Executed: 2007-11-16
SINGER, WOLFGANG
Executed: 2007-11-08
GRUNER, TORALF
Executed: 2007-11-09
DITTMANN, OLAF
Executed: 2007-11-11
TOTZECK, MICHAEL
Executed: 2007-11-08
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Exposure System, Method for Manufacturing a Micro-Structured Structural Member by the Aid of Such a Projection Exposure System and Polarization-Optical Element Adapted for Use in Such a System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.