Patent Assignment
Reel/Frame 020169/0865
Assignment of Assignor's Interest
Recorded: 2007-11-28
Pages: 3
Assignor
NISHIMURA, EIICHI
Executed: 2007-10-19
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Manufacturing Method of Capacitor Electrode, Manufacturing System of Capacitor Electrode, and Storage Medium