Patent Assignment
Reel/Frame 020185/0188
Assignment of Assignor's Interest
Recorded: 2007-11-27
Pages: 3
Assignors
SHI, XUELONG
Executed: 2007-10-15
CHEN, JANG FUNG
Executed: 2007-10-22
VAN DEN BROEKE, DOUGLAS
Executed: 2007-10-30
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, 5500 AH VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method, Program Product and Apparatus for Translating Geometrical Design Rules into Boundary Conditions in the Imaging Space So as to Define Test Patterns for Use in Optical Model Calibration
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.