Patent Assignment
Reel/Frame 020203/0210
Assignment of Assignor's Interest
Recorded: 2007-11-27
Pages: 3
Assignors
TATEISHI, HIDEKI
Executed: 2007-09-10
NAKADA, TSUTOMU
Executed: 2007-09-10
SUSAKI, AKIRA
Executed: 2007-09-10
SHIMA, SHOHEI
Executed: 2007-09-10
FUKUNAGA, YUKIO
Executed: 2007-09-10
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Apparatus and Method for Surface Treatment of Substrate, and Substrate Processing Apparatus and Method