Apparatus and method for surface treatment of substrate, and substrate processing apparatus and method
A surface treatment apparatus of a substrate can clean a substrate surface in the air without employing a vacuum apparatus, and can remove a natural oxide film or an organic material, such as BTA, from the substrate surface without resorting to plasma cleaning. The surface treatment apparatus includes: an inert gas supply section for supplying an inert gas to the whole or part of a substrate surface to form an oxygen-blocking zone; a heating section for keeping the substrate surface at a predetermined temperature; and a cleaning gas supply section for supplying a cleaning gas to the oxygen-blocking zone to clean the substrate surface.
1. An apparatus for surface treatment of a substrate, comprising:
an inert gas supply section for supplying an inert gas to the whole or part of a substrate surface to form an oxygen-blocking zone between the inert gas supply section and the substrate surface, the oxygen-blocking zone being configured to block out oxygen with the inert gas and being substantially free of oxygen;
a heating section for keeping the substrate surface at a predetermined temperature;
a cleaning gas supply section for supplying a cleaning gas to the oxygen-blocking zone to clean the substrate surface while the inert gas supply section supplies the inert gas to form the oxygen-blocking zone; and
a cylindrical gas flow regulating mechanism configured to surround the oxygen-blocking zone and guide a flow of the cleaning gas in the oxygen-blocking zone, the gas flow regulating mechanism having only a lateral side wall with no top wall and no bottom wall.
2. The surface treatment apparatus according to claim 1 , further comprising:
a cooling section for cooling the substrate after the cleaning of the substrate surface.
3. The surface treatment apparatus according to claim 1 , wherein the cleaning gas is a carboxylic acid gas or a reducing gas.
4. The surface treatment apparatus according to claim 1 further, comprising:
a gas discharge section for discharging gas from the gas flow regulating mechanism.
5. The surface treatment apparatus according to claim 1 , further comprising a shower head having a plurality of jet orifices formed therein, the shower head being connected to a downstream end of the inert gas supply section and a downstream end of the cleaning gas supply section, and the jet orifices are shaped and arranged to maintain the oxygen-blocking zone formed by the flow of the inert gas from the inert gas supply section while also supplying the cleaning gas to the oxygen-blocking zone from the cleaning gas supply section.