Patent Assignment
Reel/Frame 020240/0139
Assignment of Assignor's Interest
Recorded: 2007-12-12
Pages: 2
Assignors
WANG, JIE
Executed: 2007-11-16
OGAWA, YASUHIRO
Executed: 2007-11-16
YAMAMOTO, KATSUHIKO
Executed: 2007-11-13
YOKOGAWA, TAKASHI
Executed: 2007-11-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1 SOTOKANDA 4CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Manufacturing Method of Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.