Patent Assignment
Reel/Frame 020292/0690
Assignment of Assignor's Interest
Recorded: 2007-12-27
Pages: 7
Assignors
SOHMER, ALEXANDER
Executed: 2007-12-11
DODOC, AURELIAN
Executed: 2007-12-04
FELDMANN, HEIKO
Executed: 2007-12-04
ULRICH, WILHELM
Executed: 2007-11-26
FUERTER, GERHARD
Executed: 2007-11-26
EGGER, RAFAEL
Executed: 2007-11-21
HOEGELE, ARTUR
Executed: 2007-11-21
RAUM, MICHAEL
Executed: 2007-12-04
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination System for a Microlithgraphic Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.