Patent Assignment
Reel/Frame 020301/0685
Assignment of Assignor's Interest
Recorded: 2007-12-28
Pages: 9
Assignors
RADOVANOV, SVETLANA B.
Executed: 2007-12-21
KOO, BON-WOONG
Executed: 2007-12-21
SINCLAIR, FRANK
Executed: 2007-12-21
BENVENISTE, VICTOR M.
Executed: 2007-12-21
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Techniques for Providing a Multimode Ion Source