Patent Assignment
Reel/Frame 020303/0146
Assignment of Assignor's Interest
Recorded: 2007-12-29
Pages: 5
Assignors
PANNESE, PATRICK D.
Executed: 2007-07-31
KAVATHEKAR, VINAYA
Executed: 2007-08-13
VAN DER MEULEN, PETER
Executed: 2007-07-31
Assignee
BLUESHIFT TECHNOLOGIES, INC.
3 RIVERSIDE DRIVE, ANDOVER, MASSACHUSETTS, 01810
Covered Property
(1)
Methods and Systems for Controlling a Semiconductor Fabrication Process
Application:
11/743,105 →
Publication:
US 2007/0282480
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
Feb 12, 2009
From: BLUESHIFT TECHNOLOGIES, INC.
To: NORTH BRIDGE VENTURES PARTNERS V-A, L.P.
Reel/Frame 022248/0013 →
Assignment of Assignor's Interest
Dec 9, 2021
From: BROOKS AUTOMATION,INC
To: BROOKS AUTOMATION HOLDING, LLC
Reel/Frame 058481/0740 →
Assignment of Assignor's Interest
Dec 9, 2021
From: BROOKS AUTOMATION HOLDING, LLC
To: BROOKS AUTOMATION US, LLC
Reel/Frame 058482/0001 →