Patent Assignment
Reel/Frame 020354/0612
Assignment of Assignor's Interest
Recorded: 2008-01-07
Pages: 3
Assignors
AOKI, TOMOYUKI
Executed: 2007-11-21
TSURUME, TAKUYA
Executed: 2007-11-22
YAMADA, DAIKI
Executed: 2007-11-21
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Forming Conductive Layer and Substrate Having the Same, and Method for Manufacturing Semiconductor Device