Patent Assignment
Reel/Frame 020444/0373
Assignment of Assignor's Interest
Recorded: 2008-01-25
Pages: 3
Assignors
EGUCHI, SHINGO
Executed: 2008-01-07
MONMA, YOHEI
Executed: 2007-12-28
TANI, ATSUHIRO
Executed: 2007-12-28
HIROSUE, MISAKO
Executed: 2007-12-23
HASHIMOTO, KENICHI
Executed: 2007-12-28
HOSAKA, YASUHARU
Executed: 2007-12-28
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Peeling Apparatus and Manufacturing Apparatus of Semiconductor Device