Peeling apparatus and manufacturing apparatus of semiconductor device
View Patent ↗An object is to eliminate electric discharge due to static electricity generated by peeling when an element formation layer including a semiconductor element is peeled from a substrate used for manufacturing the semiconductor element. A substrate over which an element formation layer and a peeling layer are formed and a film are made to go through a gap between pressurization rollers. The film is attached to the element formation layer between the pressurization rollers. The film is bent along a curved surface of the pressurization roller on a side of the pressurization rollers, where the film is collected, and accordingly, peeling is generated between the element formation layer and the peeling layer and the element formation layer is transferred to the film. Liquid such as pure water is sequentially supplied by a nozzle to a gap between the element formation layer and the peeling layer, which is generated by peeling, so that electric charge generated on surfaces of the element formation layer and the peeling layer is diffused by the liquid.
1. A manufacturing apparatus of a semiconductor device comprising:
a unit for attaching a flexible substrate to an element formation layer including a semiconductor element formed over a substrate;
a unit for moving the flexible substrate so as to transform the element formation layer; and
a unit for supplying liquid to a surface which is exposed by peeling of the element formation layer.
2. A manufacturing apparatus of a semiconductor device comprising:
a unit for attaching a flexible substrate to an element formation layer including a semiconductor element formed over a substrate;
a unit for moving the flexible substrate so as to transform the element formation layer; and
a tank for liquid,
wherein the element formation layer is peeled from the substrate in the liquid.
3. The manufacturing apparatus according to claim 1 ,
wherein the unit for attaching the flexible substrate to the element formation layer includes a roller having a curved surface, and
wherein the flexible substrate and the element formation layer are bent along the curved surface.
4. The manufacturing apparatus according to claim 1 ,
wherein the element formation layer is separated from the substrate while bending the element formation layer, moving the flexible substrate, and supplying the liquid, and is transferred to the flexible substrate.
5. The manufacturing apparatus according to claim 1 ,
wherein the liquid is pure water.
6. The manufacturing apparatus according to claim 2 ,
further comprising a unit for moving the substrate.
7. The manufacturing apparatus according to claim 6 ,
wherein the unit for moving the substrate includes a belt conveyor.
8. The manufacturing apparatus according to claim 2 ,
wherein the liquid is pure water.
9. A peeling apparatus comprising:
a roller configured to attach a layer including a structure formed over a substrate to a film; and
a nozzle configured to supply liquid to a gap between the layer including the structure and the substrate.
10. The peeling apparatus according to claim 9 ,
wherein the roller is configured to apply pressure to the substrate and the film to attach the layer including the structure formed over the substrate and the film.
11. The peeling apparatus according to claim 9 , further comprising a second roller configured to move the film.
12. The peeling apparatus according to claim 9 ,
wherein the liquid is pure water.
13. A peeling apparatus comprising:
a roller configured to attach a layer including a structure formed over a substrate to a film; and
a nozzle configured to supply liquid such that the liquid exists at a portion between the layer including the structure and the substrate which are peeling.
14. The peeling apparatus according to claim 13 ,
wherein the roller is configured to apply pressure to the substrate and the film to attach the layer including the structure formed over the substrate and the film.
15. The peeling apparatus according to claim 13 , further comprising a second roller configured to move the film.
16. The peeling apparatus according to claim 13 ,
wherein the liquid is pure water.
17. A peeling apparatus comprising:
a roller configured to attach a layer including a structure formed over a substrate to a film; and
a tank for liquid configured to supply the liquid to a gap between the layer including the structure and the substrate.
18. The peeling apparatus according to claim 17 , further comprising a second roller configured to move the film.
19. The peeling apparatus according to claim 17 , further comprising a belt conveyor configured to move the substrate.
20. The peeling apparatus according to claim 17 ,
wherein the liquid is pure water.