Assignment of Assignor's Interest

Recorded: 2008-02-12 Pages: 4

Assignors

MANN, HANS-JEURGEN

Executed: 2003-10-01

DINGER, UDO

Executed: 2003-10-01

HUDYMA, RUSSELL

Executed: 2003-10-16

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY

Covered Properties (2)

Projection System for Euv Lithography

Patent: 7,355,678 →

Application: 11/243,407 →

Publication: US 2006/0050258

Projection System for Euv Lithograhphy

Patent: 7,375,798 →

Application: 11/657,420 →

Publication: US 2007/0153252

Related Assignments (1)

Other recorded transfers of the patents in this record — the chain of ownership.