Assignment of Assignor's Interest

Recorded: 2008-02-26 Pages: 3

Assignors

MOORE, DARREN L.

Executed: 2008-02-08

WALDFRIED, CARLO

Executed: 2008-02-08

RAJAGOPALAN, GANESH

Executed: 2008-02-22

Assignee

AXCELIS TECHNOLOGIES, INC.

108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915

Covered Property (1)

Processes for Curing Silicon Based Low-K Dielectric Materials

Patent: 8,338,315 →

Application: 12/037,222 →

Publication: US 2009/0215282

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.