Patent Assignment
Reel/Frame 020577/0611
Assignment of Assignor's Interest
Recorded: 2008-02-28
Pages: 6
Assignors
WEVERS, RUTGER
Executed: 2008-02-10
SEIFERT, ANDREAS
Executed: 2008-02-04
HARTJES, JOACHIM
Executed: 2008-01-31
DENGEL, GUENTHER
Executed: 2008-02-06
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Mirror with a Mirror Carrier and Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.