Patent Assignment
Reel/Frame 020590/0019
Assignment of Assignor's Interest
Recorded: 2008-03-03
Pages: 3
Assignors
BYKANOV, ALEXANDER N.
Executed: 2008-02-12
BRANDT, DAVID C.
Executed: 2008-02-14
FOMENKOV, IGOR V.
Executed: 2008-02-11
PARTLO, WILLIAM N.
Executed: 2008-02-11
Assignee
CYMER, INC.
17075 THORNMINT COURT, LEGAL DEPT., MS/4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
System Managing Gas Flow Between Chambers of an Extreme Ultraviolet (Euv) Photolithography Apparatus
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.