Patent Assignment
Reel/Frame 020641/0023
Assignment of Assignor's Interest
Recorded: 2008-03-12
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method for Detecting Tip Position of Probe, Alignment Method, Apparatus for Detecting Tip Position of Probe and Probe Apparatus