Method for detecting tip position of probe, alignment method, apparatus for detecting tip position of probe and probe apparatus

1. A probe tip position detecting method for detecting tip positions of a plurality of probes by using a tip position detecting device including a sensor unit for detecting tips of the probes and a movable contact body attached to the sensor unit, the method being used in inspecting electrical characteristics of an object to be inspected by bringing the object supported on a movable mounting table into electrical contact with the probes, the method comprising: a first step of moving the tip position detecting device through the mounting table to thereby bring the contact body into contact with the tips of the probes; a second step of further moving the mounting table to thereby move the contact body toward the sensor unit without causing elastic deformation to the probes; and a third step of determining a movement starting position of the contact body as the tip positions of the probes, wherein the sensor unit constantly applies a first pressure to the contact body in the second step, and wherein the contact body moves towards the sensor unit upon contact with the probes so as to maintain the first pressure constant.

2. The method of claim 1 , wherein the contact body is designed to make contact with the probes via a soft member, and

wherein the probes cause no damage to the soft member in the second step.

3. The method of claim 1 , wherein a distance between the sensor unit and the contact body is detected by the sensor unit in the second step.

4. The method of claim 3 , wherein, in the third step, the tip positions of the probes are determined based on a detection result of the sensor unit.

5. An alignment method for aligning an object to be inspected and a plurality of probes by using an imaging unit for taking an image of the object and a tip position detecting device for detecting tips of the probes, the method being used in inspecting electrical characteristics of the object by bringing the object supported on a movable mounting table into electrical contact with the probes, the method comprising:

detecting tip positions of the probes by using the tip position detecting device;

transferring probe marks of the probes to a soft member attached to the tip position detecting device by bringing the soft member into contact with the probes;

detecting the probe marks of the probes formed in the soft member by using the imaging unit; and

detecting contact positions of the object corresponding to the probes by using the imaging unit,

wherein the tip position detecting device is provided at the mounting table, and

wherein, the detecting the tip positions of the probes is executed by using the method of claim 1 .

6. The method of claim 5 , wherein the probes cause no damage to the soft member in the second step.

7. The method of claim 5 , wherein the sensor unit constantly applies a first pressure to the contact body in the second step, and

wherein the contact body moves towards the sensor unit upon contact with the probes so as to maintain the first pressure constant.

8. The method of claim 7 , wherein a distance between the sensor unit and the contact body is detected by the sensor unit in the second step.

9. The method of claim 8 , wherein, in the third step, the tip positions of the probes are determined based on a detection result of the sensor unit.

10. The apparatus of claim 5 , wherein the contact body includes a heater to heat the soft member, thereby eliminating the probe marks of the probes transferred thereon to allow the soft member to be reused.

11. A tip position detecting device for detecting tip positions of a plurality of probes when inspecting electrical characteristics of an object to be inspected by bringing the object into electrical contact with the probes, the device comprising:

a sensor mechanism for detecting tips of the probes,

wherein the sensor mechanism includes a sensor unit and a contact body movably attached to the sensor unit for making contact with the probes,

wherein the sensor unit applies a first pressure to the contact body to keep the contact body spaced apart from the sensor unit by a predetermined distance before the contact body is in contact with the probes, and

wherein the tip positions of the probes are detected by a movement of the contact body towards the sensor unit while the contact body is in contact with the probes and the first pressure is constantly applied thereto.

12. The device of claim 11 , wherein the sensor unit serves to detect a distance between the sensor unit and the contact body.

13. The device of claim 11 , wherein, when the sensor unit applies a second pressure to the contact body which is greater than the first pressure, the contact body is held against movement even if the contact body makes contact with the probes,

wherein the contact body includes a soft member detachably attached thereto and makes contact with the probes via the soft member, and

wherein the soft member is made of a material insusceptible to damage even when the contact body is moved by contacting with the probes under the first pressure.

14. The device of claim 13 , wherein probe marks of the probe are transferred to the soft member when the contact body makes contact with the probes under the second pressure.

15. The apparatus of claim 14 , wherein the contact body includes a heater to heat the soft member, thereby eliminating the probe marks of the probes transferred thereon to allow the soft member to be reused.

16. A probe apparatus comprising: a movable mounting table for supporting an object to be inspected; a plurality of probes arranged above the mounting table; and a tip position detecting device provided at the mounting table for detecting tip positions of the probes,

wherein the tip position detecting device includes a sensor mechanism for detecting tips of the probes,

wherein the sensor mechanism includes a sensor unit and a contact body movably attached to the sensor unit for making contact with the probes,

wherein the sensor unit applies a first pressure to the contact body to keep the contact body spaced apart from the sensor unit by a predetermined distance before the contact body is in contact with the probes, and

wherein the tip positions of the probes are detected by a movement of the contact body towards the sensor unit while the contact body is in contact with the probes and the first pressure is constantly applied thereto.

17. The apparatus of claim 16 , wherein the sensor unit serves to detect a distance between the sensor unit and the contact body.

18. The apparatus of claim 16 , wherein, when the sensor unit applies a second pressure to the contact body which is greater than the first pressure, the contact body is held against movement even if the contact body makes contact with the probes,

wherein the contact body includes a soft member detachably attached thereto and makes contact with the probes via the soft member, and

wherein the soft member is made of a material insusceptible to damage even when the contact body is moved by contacting with the probes under the first pressure.

19. The apparatus of claim 18 , wherein probe marks of the probes are transferred to the soft member when the contact body makes contact with the probes under the second pressure.

20. The apparatus of claim 19 , wherein the contact body includes a heater to heat the soft member, thereby eliminating the probe marks of the probes transferred thereon to allow the soft member to be reused.