Patent Assignment
Reel/Frame 020740/0812
Corrective Assignment to Correct the Name of Inventor from Hans-Jurgen Mann to Hans-Juergen Mann and Correct Title Previously Recorded on Reel 016631 Frame 0362. Assignor(S) Hereby Confirms the Assignment of Assignor's Interest.
Recorded: 2008-04-02
Pages: 12
Assignors
MANN, HANS-JUERGEN
Executed: 2005-03-21
DINGER, UDO
Executed: 2005-04-05
ULRICH, WILHEIM
Executed: 2005-03-21
REINECKE, WOLFGANG
Executed: 2005-04-06
ENGEL, THOMAS
Executed: 2005-03-21
ZIBOLD, AXEL
Executed: 2005-05-13
HARNISCH, WOLFGANG
Executed: 2005-03-21
WEDOWSKI, MARCO
Executed: 2005-03-21
PAUSCHINGER, DIETER
Executed: 2005-04-10
Assignees
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, 07746 JENA, GERMANY
Covered Property
(1)
Reflective X-Ray Microscope and Inspection System for Examining Objects with Wavelengths Less Than or Equal to 100 Nm
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
May 31, 2005
From: MANN, HANS-JURGEN; DINGER, UDO; ULRICH, WILHEIM; REINECKE, WOLFGANG
To: CARL ZEISS SMT AG; CARL ZEISS MICROELECTRONIC SYSTEMS GMBH
Reel/Frame 016631/0362 →
A Modifying Conversion
Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →
Merger
Sep 19, 2016
From: CARL ZEISS SMS GMBH
To: CARL ZEISS SMT GMBH
Reel/Frame 040069/0705 →