Patent Assignment
Reel/Frame 020788/0647
Assignment of Assignor's Interest
Recorded: 2008-04-07
Pages: 3
Assignor
HANSEN, STEVE
Executed: 2008-03-05
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, 550 AH VELDHOVEN, THE, NETHERLANDS
Covered Property
(1)
Method, Program Product and Apparatus for Predicting Line Width Roughness and Resist Pattern Failure and the Use Thereof in a Lithography Simulation Process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.