Patent Assignment
Reel/Frame 020914/0647
Assignment of Assignor's Interest
Recorded: 2008-04-24
Pages: 2
Assignors
UENO, YOSHIFUMI
Executed: 2008-04-14
MORIYA, MASATO
Executed: 2008-04-14
NAKANO, MASAKI
Executed: 2008-04-14
KOMORI, HIROSHI
Executed: 2008-04-14
Assignee
KOMATSU LTD.
1200, MANDA, HIRATSUKA-SHI, TOKYO, 254-0913, JAPAN
Covered Property
(1)
Optical Element Contamination Preventing Method and Optical Element Contamination Preventing Device of Extreme Ultraviolet Light Source
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.