Patent Assignment
Reel/Frame 020947/0122
Assignment of Assignor's Interest
Recorded: 2008-05-14
Pages: 4
Assignors
TRAN, DR. CHINH DUC, PROF
Executed: 2008-05-07
BRUDERMANN, JESKO, DR.
Executed: 2008-05-07
MADER, BJOERN
Executed: 2008-05-07
DORNIEDEN, GILBERT
Executed: 2008-05-08
BRAUNER, THOMAS
Executed: 2008-04-28
Assignee
XTREME TECHNOLOGIES GMBH
GOESCHWITZER STRASSE 25, JENA, D-07745, GERMANY
Covered Property
(1)
Device for the Generation of a Gas Curtain for Plasma-Based Euv Radiation Sources
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.