Patent Assignment
Reel/Frame 020948/0116
Assignment of Assignor's Interest
Recorded: 2008-05-15
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Heating Apparatus, Heat Treatment Apparatus, Computer Program and Storage Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.