Patent Assignment
Reel/Frame 020971/0470
Corrective Assignment to Correct the Assignee's Address Previously Recorded on Reel 020948 Frame 0116. Assignor(S) Hereby Confirms the Assignment.
Recorded: 2008-05-20
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Heating Apparatus, Heat Treatment Apparatus, Computer Program and Storage Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.