Assignment of Assignor's Interest

Recorded: 2008-05-15 Pages: 2

Assignor

VASCHENKO, GEORGIY

Executed: 2008-05-15

Assignee

CYMER, INC.

17075 THORNMINT COURT, LEGAL DEPT., MS/4-2D, SAN DIEGO, CALIFORNIA, 92127

Covered Property (1)

Laser Produced Plasma Euv Light Source Having a Droplet Stream Produced Using a Modulated Disturbance Wave

Patent: 7,897,947 →

Application: 11/827,803 →

Publication: US 2009/0014668

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.