Patent Assignment
Reel/Frame 020975/0334
Assignment of Assignor's Interest
Recorded: 2008-05-14
Pages: 2
Assignors
BERGER, GABRIEL
Executed: 2008-04-23
COSKUN, TAMER
Executed: 2008-04-17
PARK, SANGBONG
Executed: 2008-05-13
CHEN, JANG FUNG
Executed: 2008-05-14
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, 5500 AH VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method, Program Product and Apparatus for Generating a Calibrated Pupil Kernel and Method of Using the Same in a Lithography Simulation Process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.