Patent Assignment
Reel/Frame 021259/0371
Assignment of Assignor's Interest
Recorded: 2008-07-11
Pages: 5
Assignors
DEKRAKER, DAVID
Executed: 2008-06-09
BUTTERBAUGH, JEFFERY W.
Executed: 2008-06-06
WILLIAMSON, RICHARD E.
Executed: 2008-06-16
Assignee
FSI INTERNATIONAL, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318-3052
Covered Property
(1)
Process for Treatment of Substrates with Water Vapor or Steam
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.