Patent Assignment
Reel/Frame 021312/0711
Assignment of Assignor's Interest
Recorded: 2008-07-30
Pages: 4
Assignors
BEDER, SUSANNE
Executed: 2008-07-06
KRAEHMER, DANIEL
Executed: 2008-07-08
FELDMANN, HEIKO
Executed: 2008-07-03
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Objective of a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.