Patent Assignment
Reel/Frame 021381/0567
Assignment of Assignor's Interest
Recorded: 2008-08-13
Pages: 2
Assignor
MAEDA, KIYOHIKO
Executed: 2008-08-05
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU,, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Semiconductor Device Manufacturing Method and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.