Patent Assignment
Reel/Frame 021475/0188
Assignment of Assignor's Interest
Recorded: 2008-09-03
Pages: 2
Assignor
KIYOSE, HIROMI
Executed: 2008-08-08
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO 602-858, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method for Performing Etching Process with Phosphoric Acid Solution
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.