Patent Assignment
Reel/Frame 021488/0556
Assignment of Assignor's Interest
Recorded: 2008-09-05
Pages: 5
Assignee
MKS INSTRUMENTS, INC.
2 TECH DRIVE, SUITE 201, ANDOVER, MASSACHUSETTS, 01810
Covered Property
(1)
Semiconductor yield management system and method
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.