Patent Assignment
Reel/Frame 021490/0376
Assignment of Assignor's Interest
Recorded: 2008-09-05
Pages: 3
Assignor
CHANG, CHIH-WING
Executed: 2008-08-20
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method and Apparatus for Gating Photomask Contamination